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Evaluation of plasma charging damage in ultrathin gate oxides.

Authors :
Horng-Chih Lin
Chi-Chun Chen
Chao-Hsing Chien
Szu-Kang Hsein
Meng-Fan Wang
Tien-Sheng Chao
Tiao-Yuan Huang
Chun-Yen Chang
Source :
IEEE Electron Device Letters; 1998, Vol. 19 Issue 3, p68-70, 3p
Publication Year :
1998

Details

Language :
English
ISSN :
07413106
Volume :
19
Issue :
3
Database :
Complementary Index
Journal :
IEEE Electron Device Letters
Publication Type :
Academic Journal
Accession number :
92796752
Full Text :
https://doi.org/10.1109/55.661167