Root-cause decomposition of line edge roughness and its application to cross-section profile prediction using top-view SEM images.

The line-edge roughness obtained from top-view scanning electron microscope (SEM) images is decomposed into three components; parallel shift, cross-sectional shape deformation, and surface roughness. The local slope angle of the pattern surface is estimated from the surface roughness component, which corresponds to the projection of the surface roughness onto the substrate plain. Cross-sectional profiles reconstructed by scanning this procedure across top-view SEM images show good agreement with the results obtained by other metrology methods, such as atomic force microscopy. [ABSTRACT FROM AUTHOR]