Power MEMS and microengines.

Authors :: Epstein, A.H.
Senturia, S.D.
Anathasuresh, G.
Ayon, A.
Breuer, K.
Chen, K.-S.
Ehrich, F.
Gauba, G.
Ghodssi, R.
Groshenry, C.
Jacobson, S.
Lang, J.
Mehra, C.-C.
Mur Miranda, J.
Nagle, S.
Orr, D.
Piekos, E.
Schmidt, M.
Shirley, G.
Spearing, S.
Source :: Proceedings of International Solid State Sensors & Actuators Conference (Transducers '97); 1997, Issue 2, p753-753, 1p
Publication Year :: 1997

Language :: English
ISBNs :: 9780780338296
Issue :: 2
Database :: Complementary Index
Journal :: Proceedings of International Solid State Sensors & Actuators Conference (Transducers '97)
Publication Type :: Conference
Accession number :: 92449586
Full Text :: https://doi.org/10.1109/SENSOR.1997.635209