Diagnostics of positive and negative ions in high-density CF/sub 4/ plasmas by time-of-flight mass spectrometry.

Details

Language :

English

ISBNs :

9780780333222

Database :

Complementary Index

Journal :

IEEE Conference Record - Abstracts 1996 IEEE International Conference on Plasma Science

Publication Type :

Conference

Accession number :

92412879

Full Text :

https://doi.org/10.1109/PLASMA.1996.550729