Evaluation of plasma-induced charging damage on metal contact process.

Authors :: Kyoung-Sub Shin
Ji-Soo Kim
Wan-Jae Park
Chang-Jin Kang
Tae-Hyuk Ahn
Joo-Tae Moon
Sang-In Lee
Source :: ICVC '99 6th International Conference on VLSI & CAD (Cat No99EX361); 1999, p143-146, 4p
Publication Year :: 1999

Language :: English
ISBNs :: 9780780357273
Database :: Complementary Index
Journal :: ICVC '99 6th International Conference on VLSI & CAD (Cat No99EX361)
Publication Type :: Conference
Accession number :: 92402640
Full Text :: https://doi.org/10.1109/ICVC.1999.820853