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Three dimensional metallization for vertically integrated circuits.
- Source :
- European Workshop Materials for Advanced Metallization,; 1998, p94-98, 5p
- Publication Year :
- 1998
Details
- Language :
- English
- Database :
- Complementary Index
- Journal :
- European Workshop Materials for Advanced Metallization,
- Publication Type :
- Conference
- Accession number :
- 92390458
- Full Text :
- https://doi.org/10.1109/MAM.1997.621072