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Large Area Deposition of Device Quality SiO2 for Poly Si TFT Fabrication.

Authors :
Plais, F.
Morin, B.
Stroh, R. J.
Kretz, T.
Legagneux, P.
Huet, O.
Walaine, C.
Pribat, D.
Jiang, N.
Hugon, M.C.
Agius, B.
Source :
ESSDERC '93: 23rd European solid State Device Research Conference; 1993, p65-68, 4p
Publication Year :
1993

Details

Language :
English
ISBNs :
9782863321355
Database :
Complementary Index
Journal :
ESSDERC '93: 23rd European solid State Device Research Conference
Publication Type :
Conference
Accession number :
92389346