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In-process control of Co silicide formation by RTA.

Authors :
Dilhac, J-M.
Ganibal, C.
Nolhier, N.
Moynagh, P.B.
Chew, C.P.
Rosser, P.J.
Source :
ESSDERC '92: 22nd European Solid State Device Research conference; 1992, p379-382, 4p
Publication Year :
1992

Details

Language :
English
ISBNs :
9780444894786
Database :
Complementary Index
Journal :
ESSDERC '92: 22nd European Solid State Device Research conference
Publication Type :
Conference
Accession number :
92389148