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In-process control of Co silicide formation by RTA.
- Source :
- ESSDERC '92: 22nd European Solid State Device Research conference; 1992, p379-382, 4p
- Publication Year :
- 1992
Details
- Language :
- English
- ISBNs :
- 9780444894786
- Database :
- Complementary Index
- Journal :
- ESSDERC '92: 22nd European Solid State Device Research conference
- Publication Type :
- Conference
- Accession number :
- 92389148