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High Performance Submicron SILO Process for High Density EPROM Memories Using Rapid Thermal Nitridation of Silicon.

Authors :
Deleonibus, S.
Molle, P.
Lajzerowicz, J.
Guillaumot, B.
Laporte, P.
Bergemont, A.
Source :
ESSDERC '89: 19th European Solid State Device Research Conference; 1989, p151-154, 4p
Publication Year :
1989

Details

Language :
English
ISBNs :
9780387510002
Database :
Complementary Index
Journal :
ESSDERC '89: 19th European Solid State Device Research Conference
Publication Type :
Conference
Accession number :
92388780

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