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Advanced Hi-CMOS device technology.

Authors :
Sakai, Y.
Hayashida, T.
Hashimoto, N.
Mimato, O.
Masuhara, T.
Nagasawa, K.
Yasui, T.
Tanimura, N.
Source :
1981 International Electron Devices Meeting; 1981, p534-537, 4p
Publication Year :
1981

Details

Language :
English
Database :
Complementary Index
Journal :
1981 International Electron Devices Meeting
Publication Type :
Conference
Accession number :
92381341
Full Text :
https://doi.org/10.1109/IEDM.1981.190138
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