Stress measurement of SiO/sub 2/-polycrystalline silicon structures for micromechanical devices by means of infrared spectroscopy technique.

Details

Language :

English

ISBNs :

9780879425852

Database :

Complementary Index

Journal :

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers

Publication Type :

Conference

Accession number :

92361642

Full Text :

https://doi.org/10.1109/SENSOR.1991.148839