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Importance of top insulator quality for the stability of a-Si thin film transistors.

Authors :
Nakamura, T.
Yamada, T.
Takinami, M.
Suzuki, T.
Hamano, T.
Ozawa, T.
Tomiyama, S.
MacDonald, D.
Weisfield, R.
Fennell, L.
Tuan, H.
Thompson, M.
Source :
Technical Digest, International Electron Devices Meeting; 1988, p272-275, 4p
Publication Year :
1988

Details

Language :
English
Database :
Complementary Index
Journal :
Technical Digest, International Electron Devices Meeting
Publication Type :
Conference
Accession number :
92359017
Full Text :
https://doi.org/10.1109/IEDM.1988.32809