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Characterization study of plasma polymerized hexamethyldisiloxane thin films.

Authors :
Sang-Hee Lee
Jong-Kwan Park
Gu-Bum Park
Ki-Sun Cho
Ho-Whan Woo
Duck-Chool Lee
Source :
Proceedings of 5th International Conference on Properties & Applications of Dielectric Materials; 1997, Issue 2, p639-639, 1p
Publication Year :
1997

Details

Language :
English
ISBNs :
9780780326514
Issue :
2
Database :
Complementary Index
Journal :
Proceedings of 5th International Conference on Properties & Applications of Dielectric Materials
Publication Type :
Conference
Accession number :
92288672
Full Text :
https://doi.org/10.1109/ICPADM.1997.616516