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Characterization study of plasma polymerized hexamethyldisiloxane thin films.
- Source :
- Proceedings of 5th International Conference on Properties & Applications of Dielectric Materials; 1997, Issue 2, p639-639, 1p
- Publication Year :
- 1997
Details
- Language :
- English
- ISBNs :
- 9780780326514
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Proceedings of 5th International Conference on Properties & Applications of Dielectric Materials
- Publication Type :
- Conference
- Accession number :
- 92288672
- Full Text :
- https://doi.org/10.1109/ICPADM.1997.616516