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All-solid-state exciter for high-power, high-repetition-rate excimer laser.

Authors :
Endo, A.
Okamura, K.
Kakizaki, K.
Takagi, S.
Kaneko, E.
Source :
Proceedings of 1996 International Power Modulator Symposium; 1996, p63-66, 4p
Publication Year :
1996

Details

Language :
English
ISBNs :
9780780330764
Database :
Complementary Index
Journal :
Proceedings of 1996 International Power Modulator Symposium
Publication Type :
Conference
Accession number :
92278138
Full Text :
https://doi.org/10.1109/MODSYM.1996.564451