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Molecular Ion Implantation Technique For Obtaining The Same Depth Profile For The Component Atoms.

Authors :
Ishikawa, J.
Tsuji, H.
Mimura, M.
Gotoh, Y.
Source :
Proceedings of 11th International Conference on Ion Implantation Technology; 1996, p776-779, 4p
Publication Year :
1996

Details

Language :
English
ISBNs :
9780780332898
Database :
Complementary Index
Journal :
Proceedings of 11th International Conference on Ion Implantation Technology
Publication Type :
Conference
Accession number :
92255109
Full Text :
https://doi.org/10.1109/IIT.1996.586568
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