The beam performance of the Genus Tandetron 1520 MeV implanter.

Authors :: Tokoro, N.
Sakase, T.
Bowen, C.M.
Maciejowski, P.E.
O'Connor, J.P.
Source :: Proceedings of 11th International Conference on Ion Implantation Technology; 1996, p443-446, 4p
Publication Year :: 1996

Language :: English
ISBNs :: 9780780332898
Database :: Complementary Index
Journal :: Proceedings of 11th International Conference on Ion Implantation Technology
Publication Type :: Conference
Accession number :: 92255023
Full Text :: https://doi.org/10.1109/IIT.1996.586393