High current implanter dopant cross-contamination and its control.

Authors :: Jiejie Xu
Lee, H.S.
Source :: Proceedings of 11th International Conference on Ion Implantation Technology; 1996, p151-154, 4p
Publication Year :: 1996

Language :: English
ISBNs :: 9780780332898
Database :: Complementary Index
Journal :: Proceedings of 11th International Conference on Ion Implantation Technology
Publication Type :: Conference
Accession number :: 92254947
Full Text :: https://doi.org/10.1109/IIT.1996.586161