Novel processing of high aspect ratio 1-3 structures of high density PZT.

Authors :: Wang, S.N.
Li, J.-F.
Toda, R.
Watanabe, R.
Minami, K.
Esashi, M.
Source :: Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p223-228, 6p
Publication Year :: 1998

Language :: English
ISBNs :: 9780780344129
Database :: Complementary Index
Journal :: Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176
Publication Type :: Conference
Accession number :: 92253089
Full Text :: https://doi.org/10.1109/MEMSYS.1998.659758