InP/insulator interface properties: a comparison between UVCVD, DECR PECVD and 13.56 MHz PECVD.

Details

Language :

English

ISBNs :

9780879426262

Database :

Complementary Index

Journal :

Proceedings 1991 Third International Conference Indium Phosphide & Related Materials

Publication Type :

Conference

Accession number :

92218079

Full Text :

https://doi.org/10.1109/ICIPRM.1991.147434