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Silicon wafer bonding for sealed vacuum microelectronic devices.

Authors :
Qing-An Huang
Ming Qin
Hui-Zhen Zhang
Source :
IVMC '95 Eighth International Vacuum Microelectronics Conference Technical Digest (Cat NoTH8012); 1995, p159-163, 5p
Publication Year :
1995

Details

Language :
English
ISBNs :
9780780321434
Database :
Complementary Index
Journal :
IVMC '95 Eighth International Vacuum Microelectronics Conference Technical Digest (Cat NoTH8012)
Publication Type :
Conference
Accession number :
92195805
Full Text :
https://doi.org/10.1109/IVMC.1995.487015