CVD tungsten and tungsten silicide for multilevel metallization.

Authors :: Wu, S.
Price, J.B.
Rosler, R.S.
Mendoca, J.
Beers, A.
Source :: International Symposium on VLSI Technology, Systems & Applications; 1989, p63-67, 5p
Publication Year :: 1989

Language :: English
Database :: Complementary Index
Journal :: International Symposium on VLSI Technology, Systems & Applications
Publication Type :: Conference
Accession number :: 92190697
Full Text :: https://doi.org/10.1109/VTSA.1989.68583