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A new high temperature electrode-barrier technology on high density ferroelectric capacitor structure.
- Source :
- International Electron Devices Meeting Technical Digest; 1996, p699-702, 4p
- Publication Year :
- 1996
Details
- Language :
- English
- ISBNs :
- 9780780333932
- Database :
- Complementary Index
- Journal :
- International Electron Devices Meeting Technical Digest
- Publication Type :
- Conference
- Accession number :
- 92188446
- Full Text :
- https://doi.org/10.1109/IEDM.1996.554077