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A highly manufacturable corner rounding solution for 0.18 /spl mu/m shallow trench isolation.

Authors :
Chang, C.P.
Pai, C.S.
Baumann, F.H.
Liu, C.T.
Rafferty, C.S.
Pinto, M.R.
Lloyd, E.J.
Bude, M.
Klemens, F.P.
Miner, J.F.
Cheung, K.P.
Colonell, J.I.
Lai, W.Y.C.
Vaidya, H.
Hillenius, S.J.
Liu, R.C.
Clemens, J.T.
Source :
International Electron Devices Meeting IEDM Technical Digest; 1997, p661-664, 4p
Publication Year :
1997

Details

Language :
English
ISBNs :
9780780341005
Database :
Complementary Index
Journal :
International Electron Devices Meeting IEDM Technical Digest
Publication Type :
Conference
Accession number :
92188223
Full Text :
https://doi.org/10.1109/IEDM.1997.650470
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