Electrical evaluation of dry etching damage on the side wall of mesa structure.

Authors :: Yamamoto, N.
Mawatari, H.
Kishi, K.
Source :: Conference Proceedings 1998 International Conference on Indium Phosphide & Related Materials (Cat No98CH36129); 1998, p467-470, 4p
Publication Year :: 1998

Language :: English
ISBNs :: 9780780342200
Database :: Complementary Index
Journal :: Conference Proceedings 1998 International Conference on Indium Phosphide & Related Materials (Cat No98CH36129)
Publication Type :: Conference
Accession number :: 92165035
Full Text :: https://doi.org/10.1109/ICIPRM.1998.712527