A new low-voltage contrast mechanism to image local defects in very thin silicon dioxide films: true oxide electron beam induced current.

Details

Language :

English

ISBNs :

9780780307827

Database :

Complementary Index

Journal :

31st Annual Proceedings Reliability Physics 1993

Publication Type :

Conference

Accession number :

92147615

Full Text :

https://doi.org/10.1109/RELPHY.1993.283325