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High performance raised Gate/Source/Drain transistors for sub-0.15 um CMOS technologies.

Authors :
van Meer, H.
Kubicek, S.
Lyu, J.
Caymax, M.
Loo, R.
De Meyer, K.
Source :
29th European Solid-State Device Research Conference; 1999, Issue 1, p388-391, 4p
Publication Year :
1999

Details

Language :
English
ISBNs :
9782863322451
Issue :
1
Database :
Complementary Index
Journal :
29th European Solid-State Device Research Conference
Publication Type :
Conference
Accession number :
92145773

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