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CF4/O2 Plasma Accelerated Aluminum Metallization Corrosion in Plastic Encapsulated ICs in the Presence of Contaminated Die Attach Epoxies.
- Source :
- 19th International Reliability Physics Symposium; 1981, p88-92, 5p
- Publication Year :
- 1981
Details
- Language :
- English
- Database :
- Complementary Index
- Journal :
- 19th International Reliability Physics Symposium
- Publication Type :
- Conference
- Accession number :
- 92140932
- Full Text :
- https://doi.org/10.1109/IRPS.1981.362979