Ozone treatment of persistent organic chemical wastewater.

Authors :: Tanaka, J.
Hirano, K.
Toyoda, A.
Taira, T.
Koito, T.
Hidaka, M.
Source :: 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No99CH36314); 1999, p275-278, 4p
Publication Year :: 1999

Language :: English
ISBNs :: 9780780354036
Database :: Complementary Index
Journal :: 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No99CH36314)
Publication Type :: Conference
Accession number :: 92136199
Full Text :: https://doi.org/10.1109/ISSM.1999.808789