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Low energy (0.25-10 keV) /sup 11/B/sup +/ ion implantation damage characterisation using Rutherford backscattering spectrometry.

Authors :
Collart, E.J.H.
Heijdra, M.
Weemers, K.
Tamminga, Y.
van Berkum, J.G.M.
Verheijen, M.A.
Source :
1998 International Conference on Ion Implantation Technology Proceedings (Cat No98EX144); 1999, Issue 2, p712-712, 1p
Publication Year :
1999

Details

Language :
English
ISBNs :
9780780345386
Issue :
2
Database :
Complementary Index
Journal :
1998 International Conference on Ion Implantation Technology Proceedings (Cat No98EX144)
Publication Type :
Conference
Accession number :
92129046
Full Text :
https://doi.org/10.1109/IIT.1998.813766