Investigation of uniformity degradation by intentionally induced fast beam glitch with a disk-slot batch type endstation.

Details

Language :

English

ISBNs :

9780780345386

Issue :

1

Database :

Complementary Index

Journal :

1998 International Conference on Ion Implantation Technology Proceedings (Cat No98EX144)

Publication Type :

Conference

Accession number :

92129017

Full Text :

https://doi.org/10.1109/IIT.1999.812190