Effects of HCl-H/sub 2/ pre-growth etching on quality of 6H-SiC epitaxial layers.

Details

Language :

English

ISBNs :

9780780344372

Database :

Complementary Index

Journal :

1998 High-Temperature Electronic Materials, Devices & Sensors Conference (Cat No98EX132)

Publication Type :

Conference

Accession number :

92124528

Full Text :

https://doi.org/10.1109/HTEMDS.1998.730641