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Growth of wurtzite GaN films on /spl alpha/-Al/sub 2/O/sub 3/ substrates using light radiation heating metal-organic chemical vapor deposition.

Authors :
Zhou, Y.G.
Shen, B.
Chen, Z.Z.
Chen, P.
Zhang, R.
Shi, Y.
Zheng, Y.D.
Source :
1998 5th International Conference on Solid-State & Integrated Circuit Technology Proceedings (Cat No98EX105); 1998, p701-704, 4p
Publication Year :
1998

Details

Language :
English
ISBNs :
9780780343061
Database :
Complementary Index
Journal :
1998 5th International Conference on Solid-State & Integrated Circuit Technology Proceedings (Cat No98EX105)
Publication Type :
Conference
Accession number :
92123570
Full Text :
https://doi.org/10.1109/ICSICT.1998.786065