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Statistical enhancement of a reflectometry metrology system.

Authors :
Xinhui Niu
Spanos, C.
Source :
1997 2nd International Workshop on Statistical Metrology; 1997, p40-43, 4p
Publication Year :
1997

Details

Language :
English
ISBNs :
9780780337374
Database :
Complementary Index
Journal :
1997 2nd International Workshop on Statistical Metrology
Publication Type :
Conference
Accession number :
92114476
Full Text :
https://doi.org/10.1109/IWSTM.1997.629409
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