An integrated low resistance aluminum plug and low-k polymer dielectric for high performance 0.25 /spl mu/m interconnects.

Details

Language :

English

ISBNs :

9780780333420

Database :

Complementary Index

Journal :

1996 Symposium on VLSI Technology Digest of Technical Papers

Publication Type :

Conference

Accession number :

92113759

Full Text :

https://doi.org/10.1109/VLSIT.1996.507803