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Reliable CVD Inter-Poly Dielectrics for Advanced E&EEPROM.

Authors :
Mori, S.
Mikata, Y.
Sato, M.
Shinada, K.
Yoshikawa, K.
Nozawa, H.
Matsuda, T.
Yanase, T.
Source :
1985 Symposium on VLSI Technology Digest of Technical Papers; 1985, p16-17, 2p
Publication Year :
1985

Details

Language :
English
ISBNs :
9784930813091
Database :
Complementary Index
Journal :
1985 Symposium on VLSI Technology Digest of Technical Papers
Publication Type :
Conference
Accession number :
92054524

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