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Optimum crystallographic orientation of submicron CMOS devices.

Authors :
Aoki, M.
Yano, K.
Masuhara, T.
Ikeda, S.
Meguro, S.
Source :
1985 International Electron Devices Meeting; 1985, p577-580, 4p
Publication Year :
1985

Details

Language :
English
Database :
Complementary Index
Journal :
1985 International Electron Devices Meeting
Publication Type :
Conference
Accession number :
92054456
Full Text :
https://doi.org/10.1109/IEDM.1985.191037