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Physical characterization of electron trapping in unibond oxides.

Authors :
Gruber, O.
Marcandella, C.
Paillet, Ph.
Musseau, O.
Aspar, B.
Auberton-Hervé, A.J.
Source :
IEEE Transactions on Nuclear Science; Jun98 Part 3 of 4, Vol. 45 Issue 3, p1402, 5p, 1 Chart, 6 Graphs
Publication Year :
1998

Abstract

Presents a study which examined the electron trapping properties of Unibond oxides, with reference to Silicon-On-Insulator technologies. Method used to measure the radiative response of Unibond oxides under different irradiation conditions; Comparison of Separation by IMplanted OXygen (SIMOX) and Unibond oxides; Information on the use of X-ray irradiation to investigate the trapping properties of the Unibond buried oxide.

Details

Language :
English
ISSN :
00189499
Volume :
45
Issue :
3
Database :
Complementary Index
Journal :
IEEE Transactions on Nuclear Science
Publication Type :
Academic Journal
Accession number :
919066
Full Text :
https://doi.org/10.1109/23.685214