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Crystallography of excimer laser-crystallized In-Ga-Zn-O film.

Authors :
Shimomura, Akihisa
Koyama, Masaki
Ishiyama, Takahisa
Ohta, Masashi
Tsubuku, Masashi
Kikuchi, Erumu
Hirohashi, Takuya
Takahashi, Masahiro
Yamazaki, Shunpei
Source :
2013 Twentieth International Workshop on Active-Matrix Flatpanel Displays & Devices (AM-FPD); 2013, p155-158, 4p
Publication Year :
2013

Details

Language :
English
ISBNs :
9784863483095
Database :
Complementary Index
Journal :
2013 Twentieth International Workshop on Active-Matrix Flatpanel Displays & Devices (AM-FPD)
Publication Type :
Conference
Accession number :
91780385