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Analysis of nanoscale crystalline structure of In-Ga-Zn-O thin film with nano beam electron diffraction.

Authors :
Ito, Shunichi
Takahashi, Erika
Dairiki, Koji
Oota, Masashi
Hirohashi, Takuya
Takahashi, Masahiro
Tsubuku, Masashi
Yamazaki, Shunpei
Kimizuka, Noboru
Source :
2013 Twentieth International Workshop on Active-Matrix Flatpanel Displays & Devices (AM-FPD); 2013, p151-154, 4p
Publication Year :
2013

Details

Language :
English
ISBNs :
9784863483095
Database :
Complementary Index
Journal :
2013 Twentieth International Workshop on Active-Matrix Flatpanel Displays & Devices (AM-FPD)
Publication Type :
Conference
Accession number :
91780384

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