Cite
Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope.
MLA
Shihua Wang, et al. “Evaluation of a Vertical Piezoelectric Transducer Stage Using a Large Range Metrological Atomic Force Microscope.” Journal of Micro/Nanolithography, MEMS & MOEMS, vol. 11, no. 1, Jan. 2012, pp. 1–7. EBSCOhost, https://doi.org/10.1117/1.JMM.11.1.011005.
APA
Shihua Wang, Siew Leng Tan, & Gan Xu. (2012). Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope. Journal of Micro/Nanolithography, MEMS & MOEMS, 11(1), 1–7. https://doi.org/10.1117/1.JMM.11.1.011005
Chicago
Shihua Wang, Siew Leng Tan, and Gan Xu. 2012. “Evaluation of a Vertical Piezoelectric Transducer Stage Using a Large Range Metrological Atomic Force Microscope.” Journal of Micro/Nanolithography, MEMS & MOEMS 11 (1): 1–7. doi:10.1117/1.JMM.11.1.011005.