High-k dielectric FinFETs towards sensing integrated circuits.

Authors :: Rigante, S.
Scarbolo, P.
Bouvet, D.
Wipf, M.
Tarasov, A.
Bedner, K.
Ionescu, A.M.
Source :: 2013 14th International Conference on Ultimate Integration on Silicon (ULIS); 2013, p73-76, 4p
Publication Year :: 2013

Language :: English
ISBNs :: 9781467348003
Database :: Complementary Index
Journal :: 2013 14th International Conference on Ultimate Integration on Silicon (ULIS)
Publication Type :: Conference
Accession number :: 89506969
Full Text :: https://doi.org/10.1109/ULIS.2013.6523494