Simulation-based look-ahead release planning for color filter fabs.

This study presents a look-ahead release planning approach on the basis of AutoMod simulation model for a sixth-generation thin film transistor liquid crystal display color filter (CF) fab in north Taiwan. The studied CF fab has two identical lines with the processes of black matrix (BM), color layer [red, green, and blue (RGB)], indium tin oxide, and photo spacer (PS). These two lines share two supporting processes, multi-domain vertical alignment (MVA) and laboratory (LAB). MVA has the capability and flexibility to provide the functions of RGB and PS, whereas LAB can provide the functions of BM and RGB. The production release planning becomes cornplex because of the equipment flexibility in supporting each other. An AutoMod simulation mode[ is therefore developed and validated using real data from the fab. The AutoMod simulation model is well representative of the real system with less than 10% difference in throughput in all production stations. Using simulation to look ahead, a production controller can predict potential equipment idleness and make adjustment to better utilize equipment capacity. On the basis of simulation with design of experiments, the proposed simulation-based look-ahead release plan is demonstrated to be effective in improving system throughput. [ABSTRACT FROM AUTHOR]