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Al xTa yO z Mixture Coatings Prepared Using Atomic Layer Deposition for Corrosion Protection of Steel.

Authors :
Härkönen, Emma
Díaz, Belén
Światowska, Jolanta
Maurice, Vincent
Seyeux, Antoine
Fenker, Martin
Tóth, Lajos
Radnóczi, György
Marcus, Philippe
Ritala, Mikko
Source :
Chemical Vapor Deposition; Jun2013, Vol. 19 Issue 4-6, p194-203, 10p
Publication Year :
2013

Abstract

Atomic layer deposited (ALD) 50 nm Al<subscript> x</subscript>Ta<subscript> y</subscript>O<subscript> z</subscript> mixture coatings are grown on steel for corrosion protection. In morphological and compositional analyses the coatings are found to be uniform, conformal, well-adhered, and low in defect density. Corrosion protection properties are evaluated with polarization measurements and neutral salt spray (NSS) testing. The sealing properties of the mixtures improve with increasing aluminum oxide content, whereas the protection durability improves with increasing tantalum oxide content. In comparison to single-layer and nano-laminate ALD Al<subscript>2</subscript>O<subscript>3</subscript> and Ta<subscript>2</subscript>O<subscript>5</subscript> coatings, all mixtures are found to have better protective properties. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
09481907
Volume :
19
Issue :
4-6
Database :
Complementary Index
Journal :
Chemical Vapor Deposition
Publication Type :
Academic Journal
Accession number :
88230198
Full Text :
https://doi.org/10.1002/cvde.201207028