Design and development of multiple sensor array based on SnO2 thin films for e-nose application.

Fabrication of a 2 × 4 multiple sensor array based on SnO₂ thin films was demonstrated. SnO₂ thin films were deposited on Al₂O₃ substrates and modified selectively using Au and CuO by sputtering. The sensor array was tested for its gas sensing characteristics towards H₂S. The maximum sensor response (S=52) was observed in case of Au modified SnO₂ thin films. By the surface modification using Au there is increase in the sensor response at all temperature. With the increase in temperature, sensor response decreases. [ABSTRACT FROM AUTHOR]