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X-Ray Studies of Strain in Laser-Crystallized SOI Films.

Authors :
Rivier, Michel
Reidinger, F.
Goetz, G.
Mckitterick, J.
Cserhati, A.
Source :
MRS Online Proceedings Library; 01/04/1984, Vol. 35, pN.PAG-1, 1p
Publication Year :
1984

Details

Language :
English
ISSN :
19464274
Volume :
35
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
87295314
Full Text :
https://doi.org/10.1557/PROC-35-681