On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study.

Details

Language :

English

ISSN :

09630252

Volume :

10

Issue :

1

Database :

Complementary Index

Journal :

Plasma Sources Science & Technology

Publication Type :

Academic Journal

Accession number :

86908052

Full Text :

https://doi.org/10.1088/0963-0252/10/1/310