Study on convex-corner undercutting formed by masked-maskless etching in aqueous KOH.

Details

Language :

English

ISSN :

13616439

Volume :

10

Issue :

3

Database :

Complementary Index

Journal :

Journal of Micromechanics & Microengineering

Publication Type :

Academic Journal

Accession number :

86906992

Full Text :

https://doi.org/10.1088/0960-1317/10/3/302