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Study on convex-corner undercutting formed by masked-maskless etching in aqueous KOH.
- Source :
- Journal of Micromechanics & Microengineering; 2000, Vol. 10 Issue 3, p309-313, 5p
- Publication Year :
- 2000
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 10
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 86906992
- Full Text :
- https://doi.org/10.1088/0960-1317/10/3/302