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Protein film removal by means of low-pressure microwave plasma – an imaging ellipsometry study.

Authors :
Kylián, O
Rauscher, H
Sirghi, L
Rossi, F
Source :
Journal of Physics: Conference Series; 2008, Vol. 100 Issue 1, p062017-062020, 4p
Publication Year :
2008

Details

Language :
English
ISSN :
17426588
Volume :
100
Issue :
1
Database :
Complementary Index
Journal :
Journal of Physics: Conference Series
Publication Type :
Academic Journal
Accession number :
86900782
Full Text :
https://doi.org/10.1088/1742-6596/100/6/062017