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Lateral Grain Growth in the Excimer Laser Crystallization of Poly-Si.

Authors :
Kuriyama, H.
Sano, K.
Ishida, S.
Nohda, T.
Aya, Y.
Kuwahara, T.
Noguchi, S.
Kiyama, S.
Tsuda, S.
Nakano, S.
Source :
MRS Online Proceedings Library; 01/24/1993, Vol. 321, pN.PAG-1, 1p
Publication Year :
1993

Details

Language :
English
ISSN :
19464274
Volume :
321
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
86852184
Full Text :
https://doi.org/10.1557/PROC-321-657