Dry Etching of Indium Phosphide.

MLA

Bond, P., et al. “Dry Etching of Indium Phosphide.” MRS Online Proceedings Library, vol. 262, Feb. 1992, p. N.PAG-1. EBSCOhost, https://doi.org/10.1557/PROC-262-1073.

APA

Bond, P., Sengupta, P., Orrman-Rossiter, K. G., Reeves, G. K., & Paterson, P. J. K. (1992). Dry Etching of Indium Phosphide. MRS Online Proceedings Library, 262, N.PAG-1. https://doi.org/10.1557/PROC-262-1073

Chicago

Bond, P., P. Sengupta, Kevin G. Orrman-Rossiter, G. K. Reeves, and P. J. K. Paterson. 1992. “Dry Etching of Indium Phosphide.” MRS Online Proceedings Library 262 (February): N.PAG-1. doi:10.1557/PROC-262-1073.